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Partial List of Static Control Publications for Larry Levit

  • L. Levit, and B. Baumgartner, Proceedings  IDEMA Symposium: Understanding ESD and EMI Issues in Magnetic Recording, Santa Clara, CA, May 22, (1997). Ionizer-Induced Offset Voltages on Workplace Objects Compared to Standard Charged Plate Monitor Readings
  • Levit, L. and Wallash, A., Proceedings of the 20th  EOS/ESD Symposium, Reno, Nevada, October 6-8, 1998, Paper 4B.7, p. 375, Measurement of the Effects of Ionizer Imbalance and Proximity to Ground in MR Head Handling
  • A. Steinman and L. B. Levit, A Supplement publication to Solid State Technology, May 1999. It’s the Hardware. No, it’s the Software. No it’s ESD!  
  • Larry B. Levit, Gaurisha Gajjar Desai, William Vosteen, Proceedings of the 21st EOS/ESD Symposium, Orlando FL,  1999, pp. 124-129, Measurement of Ionizer Performance –a New ApproachL.B. Levit et al.,” Proc. of SEMICON Taiwan, Taipei, Taiwan, Sept. 1999, Contamination Control in Semiconductor Manufacturing
  • Levit Larry B, Guan, Wei , Hsu, Wang-Tsai , Handley Tom, Curran, Frank,  Proceedings Semicon, China, Shanghai, China, April, 2000. Effects of Static Charge on Contamination Control in Semiconductor Manufacturin
  •  L.Levit, 157nm Reticle Handling Meeting, May 2000 Monterey CA, September 12, 2000. ESD Prevention with Corona Ionizer and Alpha-Emitter (Po210) Ionizers  
  • L.B. Levit, A. Steinman, MICRO,  June 2000,.Investigating Static Charge Issues in Photolithography Areas
  • J. Montoya, LB. Levit, and A, Englisch,  Proceedings of the 22nd Annual EOS/ESD Society, (Rome, NY: ESD Association, 2000), pp 394–405, A Study of the Mechanisms for ESD Damage to Reticles.
  • A. C. Rudack, M. Pendley and L. B. Levit, Proceedings of the 22ndEOS/ESD Symposium, Sept 26-28, 2000, Anaheim, CA, pp. 379-386.Measurement Technique Developed to Evaluate Transient EMI in a Photo Bay with and without Air Ionization
  • L.B. Levit, T.M. Hanley, F. Curran, Solid State Technology, June 2000. Watch Out For Electrostatic Attraction,  
  • J. Montoya, L.Levit and A. Englisch, IEEE Transactions on Electronics Packaging Manufacturing, vol. 24-2, pp.78-85, April 2001. A Study of the Mechanisms for ESD Damage to Reticles,
  • L. Levit and A. Englisch,  SPIE Journal, June 2001.Canary Reticle-A New Diagnostic for Reticles and a Window into the Physics of ESD Damage to Reticles
  • Levit, L.B, Weil G., International Sematech ESD Conference, October 2001, Austin,Texas,http://ismi.sematech.org/meetings/archives/other/2001.1020/10.pdf,  Reticle Boxes, ESD Control and Electrostatic Shielding
  • Larry B. Levit, Ph.D. and Wei Guan, Ph.D., Proceedings of the Annual Conference of the Electrostatics Society of America, June 27-30, 2001,  Measuring Tribocharging Efficiency in Varying Atmospheric Humidity and Nitrogen 
  • Larry B. Levit and Wei Guan, Proceeding of the 21st Annual BACUS Symposium on Photomask Technology, 3-5 October, 2001, Monterey, CA, USA, p307-312, Measurement of the Magnitude of Triboelectrification in the Environment of the 157 nm Stepper
  • L.B. Levit, L.G. Henry, J.A. Montoya, F.A. Marcelli and R.P. Lucero, Micro, April 2002, p. 41, Investigating FOUPs as a Source of ESD-Induced Electromagnetic Interference  
  •  Pendly, Michael C., Levit Larry,  Rudack Andrew, Journal of Electrostatics Volume 54, Number 1, January 2002 , pp. 95-104, Measurement Technique Developed to Evaluate Transient EMI in a Photo Bay 
  • Levit, Larry B. Proceedings of the Electrostatics Society of America, Northwestern University Chicago IL, June 26-28 2002, pp 145-146,   TransportingFOUPs as a Driver for ESD-Induced EMI
  • Carl Newberg, Larry Levit, ESD Journal, July 23, 2002, A Study of the Short Term Balance Properties of Ionizers of Various Technologies 
  • Levit, L.B.,   Montoya, J.A. Proceedings of the 2002 Advanced Semiconductor Manufacturing IEEE/SEMI Conference and Workshop pp 289- 294  Transporting FOUPs as a Driver for ESD-Induced EMI
  • Larry B. Levit, Ph.D., Peter Gefter, Ph.D., and Guan Wei, Ph.D., Proceedings of the 2003 Taiwan ESD Association Conference, Hsinchu, Taiwan, Maxwell’s Equations Applied to Ionizers, the CPM and Various Products in High Technology Manufacturing
  • Crowley,J., Ignatenko, A., Levit, L. B., Proceedings of the 25th Electrical Overstress Electrostatic Discharge Symposium 2003, pp 285-290, Biased-Plate Characterization of Pulsed DC Ionizers
  • Rudack, A, Pendley, M.C., Gagnon, P., Proceedings of the 25th EOS/ESD Symposium, Las Vegas, NV, September, 2003, Induced ESD Damage on Photomasks
  • Rudack, Andrew and Levit, Lawrence, presented at ESD Control Workshop, Semicon West, San Francisco CA, July 14, 2003. ESD Effects on Reticles
  • A. Wallash and L. Levit, Proceedings of SPIE-Reliability, Testing and Characterization of MEMS/MOEMS II, pp. 87-96, San Jose, California, January 2003, Electrical Breakdown and ESD Phenomena for Devices with Nanometer-to-Micron Gaps
  • J. M. Crowley, A. Ignatenko, L. Levit, Journal of Electrostatics, Vol. 62, pp. 219-230 (2004) Biased-plate characterization of pulsed DC ionizer
  • J. M. Crowley, D. Leri, G. Dahloff, L. Levit, Journal of Electrostatics, Vol. 61, No. 2, pp. 71-83 (2004) Equivalent Circuits For Air Ionizers Used In Static Control
  • Larry B. Levit, Ph.D., Rob K. Brown,, Jessica Figueroa,Christopher W. Long, and James Peterman,  Advanced Semiconductor Manufacturing Conference 2005, Boston MA, Effect of Ionization upon the Wet Cleaning Process
  • Lawrence B. Levit, Ph.D., Peter Gefter, Ph.D., Proceedings of the 28th EOS/ESD Symposium, 10-15 Sept. 2006 pp 246-252, Paper 4B. 4. Tucson AZ,  Ionization Applications and Pitfalls for Charge Neutralization in Substrate Handling
  • Brown R., and Levit, L., ICCCS Proceedings, 2004, Bonn, Germany, Measuring the PWP of the Handling Component of a Cryogenic Cleaning Tool
  • Steiniman, A, Levit L.,2006 Taiwan Electrostatic Discharge Conference, November 6-8 Hsinchu, Taiwan pp 43-47, ImprovingSemiconductor Yields with Air Ionization                    
  • Long, C.W. Peterman, J., Levit L., 2007 Taiwan Electrostatic Discharge Conference November 2007, Hsinchu, Taiwan, Effects of Ionization on Airborne Particles in a Semiconductor Front-End Fab                       
  • Peter Gefter, Lawrence Levit,  Proceedings of the 29th Annual Conference of the Electrostatics Society of America, June 2007, Purdue University, West Lafayette IN, A Method of Evaluating Ion Emitters for Corona Ionizers  
  • C.W. Long, J. Peterman, L.B. Levit, Arnold Steinman, Cheryl Avery,  Solid State Technology March 2007, Improving Particle Contamination Control with in-tool Air Ionization  
  • Larry Levit and Arnold Steinman,Developments in Surface Contamination and Cleaning Fundamentals and Applied Aspects,Edited by Rajiv Kohli and K.L. Mittal, December 2007 William Andrew Publishing,    Relevance of Electrostatic Discharge Controls to Particle Contamination in Cleanroom Environments 
  • Lawrence B. Levit, Journalof the IEST, Volume 51, Number 1 / April 2008, pp 114 – 121, Measuring the PWP Improvement in the Handling Component of a Semiconductor Process Tool from Air IonizationLarry Levit, Greg Endow, MKS Ion Systems, Bruce Williams, Ronald Slaby Paper 2B6, Proceedings of the 30th EOS/ESD Symposium, 7-12 Sept. 2008Tucson AZ. Considerations for CPM Measurements of Fast Switching Ionizers